Michell Instruments Ltd
Tel: 01353 658000
Fax: 01353 658199
48 Lancaster Way Business Park, , Ely, UK, CB6 3NW (Road Map)
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In-Line Trace Moisture Event Sensor
- Price
- £POA
- Part Code
- Pura Plus
- Manufacturer
- Michell Instruments
- Description
- The new Pura Plus is Michell Instruments response to latest changes in the wafer fabrication industry requirements for device size and specification. The Pura Plus is an on-line trace moisture event sensor designed for UHP inert gas applications in semiconductor fabs to allow installation at multiple locations at the final point of entry to the process tool. In the complex distribution system of a fab involving many branches, joints and points of use moisture ingress often takes place downstream of the conventional moisture monitoring point through small leaks, insufficient system design, component failure or via a procedural failures. Installed in the distribution system the Pura Plus provides rapid indication (less than 1 minute) of a moisture event as small as 20 ppb at 1 ppb baseline.
- Last Modified
- 04-Nov-2009
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