Real Time RF Diagnostics in your Wafer Fab Process

New from Bird Electronics Corporation, the Bird Diagnostic System "BDS" a groundbreaking measurement system for wafer fab operators.

With the Bird BDS it is now possible to evaluate the entire RF delivery system of your wafer fab providing a valuable insight into chamber performance, plasma condition and even predicting chamber clean endpoint.

The Bird BDS is a high power complex RF sensor measuring voltage, current and phase. This information is then converted to a 1Gsamples/s signal and transmitted to the BDS receiver. Here the information is processed for output to a PC or lap-top. The BDS is supplied with all the software required to display the results.

The RF sensor(s) can be placed in the RF delivery system both prior to the plasma chamber and/or the matching network, where sampled data can give an insight into the complexities of changing impedances and the effects of multiple harmonics on your process.

The Diagnostics System is able to spot events like 'end-point' or the necessity for 'chamber cleaning' and through it's interfaces can become an integrated part of your process or process development.

The datasheet for the Bird Diagnostic System can be found via this link:

www.aspen-electronics.com/files/bird/Bird-Diagnostic-System.pdf

For More information please call us now on 020 8868 1311.