Lee Products Ltd

THE CHALLENGE

As semiconductor node sizes drop below 10 nanometers and wafer test cells demand greater efficiency and throughput, semiconductor equipment manufacturers need to dispense and meter small volumes of critical fluids under intense operating conditions. These high-performance systems demand field-proven fluidic components capable of near-digital response. Additionally, as chip volumes increase, high-reliability solutions are required to maximize production line uptime.

THE SOLUTION

The Lee VHS Series solenoid valve is designed to accurately dispense criti­cal fluids through jewelled orifices. Precise droplets of water or coolant can be dispensed onto chips during packaging and classification, and precise volumes of helium can be metered for thermal process control and wafer probing instruments. Unlike typical solenoid valves, the VHS Series fea­tures a response time as low as 250 μs and allows near instant dispensing of spherical droplets as small as 10 nanoliters, all contained in a compact package under 6mm in diameter.

THE BENEFITS

Featuring a long life of 250 million cycles, the ultra-fast VHS Series dispense valve improves production line throughput and reduces downtime. Integra­tion of this valve into new and legacy automated systems is simple, thanks to convenient, leak-tight fluidic connections. The VHS Series is constructed from materials known for compatibility with a wide range of liquids and gases used in the semiconductor industry.

POTENTIAL APPLICATIONS

Lee VHS Series valves are field proven in semiconductor classification cooling systems, wafer probe devices, surface energy measure­ment devices, and many other specialized cutting-edge applications. The valves are ideal for applications requiring perfect droplets, metering of nanoliters of a critical fluid, or injection into a flow stream. The small size of the VHS Series allows the valve to be located exactly where it is needed, and in-line fittings allow installation within existing runs of tubing which provides added system functionality.

FIELD-PROVEN INNOVATION

The Lee Company has been at the forefront of fluid control technology since 1948, supplying millions of innovative products worldwide from our state-of-the-art manufacturing facilities in Connecticut, USA. We transform complex problems into deliverable solutions through ongoing research, design, development, and our commitment to quality and innovation. Our in-depth application knowledge enables us to collaborate with customers and provide personal, technical support through a wide network of experienced sales engineers who are ready to address any challenge.

A new INTERNAL PINCH-TUBE SOLENOID VALVE which offers outstanding reliability and an exceptionally low carry-over volume of just 3.7 µL and low overall internal volume of just 11 µL. in critical flow applications has been introduced by miniature component specialists THE LEE COMPANY. The ground-breaking Xover™ solenoid valve is designed to switch quickly and efficiently between samples, reagents, cleaning solutions or calibrants, so is ideal for applications in flow cytometry, gene sequencing, in-vitro diagnostics, urinalysis and haematology instruments.

The Xover valve features a Y-shaped elastomer tube in a 3-way configuration representing an innovative design which combines the flow path of a pinch valve with the versatility and maintenance-free performance of a chemically inert isolation valve. This means it’s easily flushed, ensures fast, efficient fluidic performance with lower power consumption (2.1 W) and at a lower overall cost.

The valve can be connected to ¼-28 flat bottom tubing assemblies or the ports can be configured to meet the specific requirements of the application. Also, mounting holes for easy integration and an electrical connector with secondary retention contribute toward ease-of-installation and improved system reliability. These benefits, along with their construction using durable, chemically inert wetted materials such as PEEK and FKM (treated) using the very latest manufacturing techniques, all help to ensure long and reliable, maintenance-free operation. 

Industries and applications where the Xover valve will be appreciated include, scientific instrumentation, drug discovery, analytical chemistry, medical, pharmaceutical and also OEM / engineering fluidic applications where low internal and zero-dead volume and inert materials are critical to system integrity and performance. ENDS.

More at:  https://www.theleeco.com/xover/

Further details are available from: Mike Stott, Lee Products Ltd,

3 High Street, Chalfont St. Peter, Gerrards Cross, Buckinghamshire, SL9 9QE UK.   

Tel: +44 (0) 1753 886664.    Email: sales@leeproducts.co.uk        www.leeproducts.co.uk

A new generation of versatile and innovative 3-port solenoid valves which offer the combination of high flow rates, low leakage and low power consumption in a miniature 10mm package have been introduced by miniature component specialists THE LEE COMPANY. The novel genvi™ solenoid valve has been designed and manufactured using innovative techniques and represents a range of valves which provide outstanding application versatility and unmatched reliability at an economical price point.

One of the key objectives in developing the genvi solenoid valve was to challenge the limitations of current fluidic technologies by allowing designers to use a miniature, low power solenoid valve, without compromising system-level flow rate requirements.

As a result the valve is capable of achieving minimum flow rates of 30 to 40 SLPM at 15 psid and its spike and hold profile results in ultra-low power consumption (318mW) during continuous duty operation on air and compatible gas applications. Crucially, this reduces system-level heating and improves battery life making it ideal for applications with challenging power budgets.

In addition to high flow, low power consumption, minimal leakage and extended life of at least 25 million cycles, genvi valves are designed to provide response times of less than 10 ms in applications with an operating temperature range from 40ºF to 120ºF.

Typical applications for the valves include molecular diagnostics, oxygen delivery, environmental monitors, compression therapy, breath analysers or wherever high flow and low power cannot be sacrificed for size and reliability.

More at: http://www.leeproducts.co.uk/corporate_video.htm#

Further details are available from: Mike Stott, Lee Products Ltd,

3 High Street, Chalfont St. Peter, Gerrards Cross, Buckinghamshire, SL9 9QE UK 

Tel: +44 (0) 1753 886664. Email: sales@leeproducts.co.uk              www.leeproducts.co.uk