SPTS Technologies


Following the merger of Surface Technology Systems and Aviza Technology, SPP Process Technology Systems is a leading manufacturer of plasma etch and deposition equipment for the semiconductor industry.

Products include Inductively Couple Plasma (ICP), Deep Reactive Ion Etch (DRIE) of silicon, dielectric etch processes, Plasma Enhanced Chemical Vapour Deposition (PECVD), Physical Vapour Deposition (PVD), Metal-Organic Chemical Vapour Deposition of TaN, and ion beam deposition.

We offer a wide range wafer handling platforms to satisfy the requirements of both low volume R&D applications and high throughout production applications, with a logical upgrade path, for ease of transition to full-scale production.

With multi-site manufacturing, and an experienced sales and service infrastructure stretching throughout Europe, Asia and America we offer high quality products and service to all our customers.

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